The Investigation of the Micro-heater based on MEMS Technology

Aoqi Yu

doi:10.54097/hset.v20i.3224

Authors

Aoqi Yu

DOI:

https://doi.org/10.54097/hset.v20i.3224

Keywords:

MEMS Technology; Micro-heater; High-throughput Method; Improvement of the Use of Material.

Abstract

This paper presents some information about the micro-heater based on the MEMS technology. The first part is about the materials using of the micro-heater, two different way of the formation which are the glasses and a novel polyimide are introduced. On the next part, the gas sensors are introduced because the micro-heaters are mainly used as component of the product, and different gas sensors will need different micro-hotplates. At the third part, the high-throughput methods are cited. The new research technique can help the laboratory to finish the preparing and processing quickly, and some particular skills, such as the characterization. The total essay is speaking about the micro-heater based on MEMS technology.

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References

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