JIA, Chenyu. Research Progress on Chemical Vapor Deposition for Contact Hole Processes. Academic Journal of Science and Technology, [S. l.], v. 20, n. 2, p. 248–253, 2026. DOI: 10.54097/8234ca91. Disponível em: https://drpress.org/ojs/index.php/ajst/article/view/34088. Acesso em: 8 jul. 2026.