Dai B. High-Precision Inversion Algorithm and Full-Spectrum Optimization for Silicon Carbide Epitaxial Layer Thickness Based on Single-Reflection Interference Model. MMAA [Internet]. 2026 Jan. 21 [cited 2026 Jul. 28];8(1):5-13. Available from: https://drpress.org/ojs/index.php/mmaa/article/view/33497