YU, Aoqi. The Investigation of the Micro-heater based on MEMS Technology. Highlights in Science, Engineering and Technology, [S. l.], v. 20, p. 20–26, 2022. DOI: 10.54097/hset.v20i.3224. Disponível em: https://drpress.org/ojs/index.php/HSET/article/view/3224. Acesso em: 13 jun. 2026.