SUN, Yuandong; NI, Peijun; ZHANG, Lijun; KANG, Jingjie; WANG, Ruolan; ZHAO, Tianhao. Study of the effect of experimental conditions on atomic layer deposition of aluminum nitride films. Highlights in Science, Engineering and Technology, [S. l.], v. 55, p. 122–127, 2023. DOI: 10.54097/hset.v55i.9928. Disponível em: https://drpress.org/ojs/index.php/HSET/article/view/9928. Acesso em: 9 sep. 2026.