Thickness Measurement Technology for Large-size Ultra-thin Substrate Glass

Abstract

The development trend of electronic substrate glass is larger, thinner and more uniform, the traditional thickness measurement method can not meet the process control needs, this paper develops an online non-destructive optical confocal measurement device from the perspective of detection method, probe selection, thickness detection model. It can realize high-precision, non-destructive and fast online thickness detection. It can be widely used in plate glass thickness detection.