Thickness Measurement Technology for Large-size Ultra-thin Substrate Glass
Keywords:Ultra-thin glass, Online thickness measurement, Optical confocal thickness measurement.
The development trend of electronic substrate glass is larger, thinner and more uniform, the traditional thickness measurement method can not meet the process control needs, this paper develops an online non-destructive optical confocal measurement device from the perspective of detection method, probe selection, thickness detection model. It can realize high-precision, non-destructive and fast online thickness detection. It can be widely used in plate glass thickness detection.
Huang Xiaobin, Wang Ronghua, et al. Electronic digital display outer diameter micrometer GB/T20919-2018.2018-05-14.
Ultrasonic Thickness Gauge, Japan Electromagnetic Detector Co. 2019 Edition.
Infrared Thickness Gauge Measurement Principles https://m.hi1718.com/data/principle/48696.html, 2018-3-12.
Laser Displacement Sensor LG-G5000 Series. Keyence(China) Limited.2019 Edition.
Color Laser Coaxial Displacement Gauge CL-3000 Series. Keyence(China) Ltd.2019 Edition.
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