Core semiconductor components and related processes
DOI:
https://doi.org/10.54097/rgmbsf08Keywords:
Micro-nano fabrication, Photolithography, MEMS sensors, Microfluidic CO₂ sensing, SemiconductorAbstract
This article systematically reviewed the core components, key technologies, and application directions in the field of microelectronics and micro - nano manufacturing. First off, it introduced the classification, parameters, and functions of substrates (like single - crystal silicon), masks, and thin - film materials. Then it explained the basic process of photolithography, exposure methods, and the control of its key parameters, as well as thin - film preparation methods such as physical and chemical vapor deposition. In terms of applications, it covered typical scenarios in the microelectronics field, like MEMS sensors, and in the biochemical field, such as PCR and gas sensing. Finally, taking the design of pressure sensors as an example, it showed the systematic design process from requirement analysis, structural design to process planning. And it came up with an idea for designing a microfluidic sensor based on CO₂ concentration detection to monitor cell respiration status, which shows the potential of micro - nano technology in interdisciplinary applications.
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